Compound Semiconductor
Low Temp Deposition and Etch, Plasma Clean / Activation, ALD
MEMS
Peizo Sol-Gel PZT, ICP Dep, ICP Etch, Surface Modification
Storage Media
PECVD DLC
Low Temp Deposition and Etch, Plasma Clean / Activation, ALD
MEMS
Peizo Sol-Gel PZT, ICP Dep, ICP Etch, Surface Modification
Storage Media
PECVD DLC
Thin Film Process Tools ...for labs to fabs
2nd International Workshop on
Piezoelectric MEMS
Sept. 6-7, 2011 at EPFL Lausanne, Switzerland
SEMICON TAIWAN
Sept. 7-9, 2011
March 7-8, 2012
Donald E. Stephens Convention Center
Rosemont, Illinois
April 23rd-26th, 2012
The Boston Park Plaza Hotel
Boston, Massachusetts, USA